Emission Microscope

For failure analysis, Emission Microscopes (EMMI) are highly effective analysis tools. The EMMI has a high-sensitive detection ability and can detect light that is emitted by electrons when linking semiconductor components. Its detectable wavelength is approximately 350nm ~ 110nm and can be widely applied to the detection of various electric leakages caused by IC component flaws such as gate oxide defects/leakage, junction leakage,etc.

When light is detectable:
Will cause light emission defects: junction leakage, contact spiking, hot electrons, latch-up, gat oxide defects/ 
      leakage(F-N current), poly-silicon filaments, substrate damage, mechanical damage and junction avalanche, etc.
Original light emission: Saturated/ Active bipolar transistors, -Saturated MOS/Dynamic CMOS, Forward biased
      diodes/Reverse biased diodes (break down), etc.

When light is undectectable:
Defects that won't appear: ohmic short and metal short
Light emission covered: buried junctions and leakage sites under metal